Units: 1.5, Hours: 3-1*-1
Principles of MEMS theory, design and fabrication. Topics include: scaling law principles: micro-mechanical structures for sensing and actuation; electrostatic, micro-thermal, piezoresistive, piezoelectric and micro-magnetic devices; micro-fluidics; micro-optics; microassembly and packaging. Case studies of MEMS device operation and micro-fabrication.
Note: *Indicates four 3-hour labs.
Prerequisites: PHYS 216 or ELEC 216.
Undergraduate course in Mechanical Engineering offered by the Department of Mechanical Engineering in the Faculty of Engineering.