Principles of Micro-ElectroMechanical Systems (MEMS). Covers theory, design and fabrication. Topics include: scaling law principles, micro-mechanical structures for micro-sensing and micro-actuations, electrostatic devices, micro-thermal devices, piezoresistive devices, piezoelectric devices, micro-magnetic devices, micro-fluidics, micro-optics, microassembly and packaging. Case studies of actual MEMS devices, their operation and their micro-fabrication are discussed.
Graduate course in the Mechanical Engineering program administered by the Faculty of Graduate Studies.