MECH 466

Microelectromechanical Systems

Units: 1.5

Hours: 3-1*-1

Principles of MEMS theory, design and fabrication. Topics include: scaling law principles: micro-mechanical structures for sensing and actuation; electrostatic, micro-thermal, piezoresistive, piezoelectric and micro-magnetic devices; micro-fluidics; micro-optics; microassembly and packaging. Case studies of MEMS device operation and micro-fabrication.

* Indicates four 3-hour labs.

Prerequisites:

Undergraduate course in Mechanical Engineering offered by the Department of Mechanical Engineering in the Faculty of Engineering.

Schedules:
Summer 2018 Fall 2018 Spring 2019

Summer timetable available: February 15. Fall and Spring timetables available: May 15.

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