MECH 555

Micro-ElectroMechanical Systems

Units: 1.5

Principles of Micro-ElectroMechanical Systems (MEMS). Covers theory, design and fabrication. Topics include: scaling law principles, micro-mechanical structures for micro-sensing and micro-actuations, electrostatic devices, micro-thermal devices, piezoresistive devices, piezoelectric devices, micro-magnetic devices, micro-fluidics, micro-optics, microassembly and packaging. Case studies of actual MEMS devices, their operation and their micro-fabrication are discussed.

Graduate course in the Mechanical Engineering program offered by the Faculty of Graduate Studies.

Schedules:
Summer 2018 Fall 2018 Spring 2019

Summer timetable available: February 15. Fall and Spring timetables available: May 15.

Before these dates the class schedule will show "No classes were found that meet your search criteria". If this message is shown after these dates, the course is not scheduled for the selected term.