Principles of MEMS theory, design and fabrication. Topics include: scaling law principles: micro-mechanical structures for sensing and actuation; electrostatic, micro-thermal, piezoresistive, piezoelectric and micro-magnetic devices; micro-fluidics; micro-optics; microassembly and packaging. Case studies of MEMS device operation and micro-fabrication.
* Indicates four 3-hour labs.
- One of MECH 285, ECE 220, ELEC 220; and
- One of ECE 216, ELEC 216, PHYS 216; and
- ECE 250 or ELEC 250.