Mechatronics & Microsystems (MEMS) Design
Development and design of autonomous robotics and mechantronic systems. Automation allows for automatic task execution in our biomedical and MEMS research, through the interplay of sensory input, control systems, and actuators. This is a core expertise of Dr. Dechev, and is a toolset to support the other research areas under investigation.
Development, design and fabrication of novel 3D MEMS, 3D microstructures, and 3D MOEMS (micro-opto-electro-mechanical systems). Can such MEMS sense physical phenomena that are difficult to measure, or provide for actuation in new ways? Can recent advances in microsystems (MEMS) technology be applied?
The three main aspects of the 3D MEMS work are: (1) A new microassembly paradigm that uses sub-millimeter MEMS microgrippers/microtools attached to the end effector of a robotic manipulator. In other words, the grippers/tools themselves are micro-scale MEMS, and are fabricated on the same chip as the micro-parts they later grasp. (2) A new modular, passive micro-grasping system capable of grasping micro-parts as small as 60um x 60um x 5um. This has been successfully used with over 30+ different types of micro-parts of various sizes and materials. (3) A modular micro-joining system to create micro-joints between micro-parts. This exciting research has enabled the construction of new 3D MEMS not previously possible to build at such small size and scale.
(i) Reactivation, retrofitting and control of a 7-DOF (degree of freedom) serial robotic arm manipulator
(ii) Advanced robotics for tele-operated and autonomous microassembly of 3D MEMS.
(iii) Novel microscopy methods for visualizing 3D MEMS.
(iv) Advanced robotics and instrumentation using machine vision for automated micromanipulation of biological cells.
(v) 3D MOEMS including 1xN and NxN optical cross-connect switches, and optical delay MEMS, developed in collaboration with Dr. M.A. Basha, currently at the Zewail City of Science and Technology, Egypt. We jointly developed the 3DRIM (Three Dimensional Rotating Inclined Mirror), which forms the basis for the cross-connect switches.
(vi) Magnetic MEMS chips for the capture and arraying of biological cells. Computer simulation of device performance, fabrication of prototypes and testing.
(vii) Development of MEMS-based embedded system for inertial position measurement
(viii) A mechatronic hand rehabilitation system employing CPM (continuous passive motion) and active resistance methods. This work is done in collaboration with local hand rehabilitation health providers.
Our Microsystems team members have expertise in the areas of: mechatronic system design, 3D mechanical design, finite element method (FEM) simulation, microassembly, custom microfabrication, optical microscopy and electron-based microscopy. Please contact us by email for further information regarding this research.
Microassembly work at the Dept. of Mechanical & Industrial Engineering, University of Toronto.